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专利名称：Method and apparatus to allow a plurality
of stages to operate in close proximity
发明人：Michael B. Binnad,Pai-Hsueh Yang申请号：US13526994申请日：20120619公开号：US09030057B2公开日：20150512
专利附图：
摘要：According to one aspect of the present invention, a stage apparatus includes afirst stage, a first magnet arrangement, and a stator arrangement that includes a first coilhaving a first width. The first magnet arrangement is associated with the first stage, and
includes a first quadrant and a second quadrant or, more generally, a first sub-array and asecond sub-array. The first quadrant has at least one first magnet arranged parallel to afirst axis, and the second quadrant has at least one second magnet arranged parallel to asecond axis. The first quadrant is adjacent to the second quadrant relative to the first axis,and is spaced apart from the second quadrant by a distance relative to the second axis.The stator arrangement is configured to cooperate with the first magnet arrangement todrive the first stage.
申请人：Michael B. Binnad,Pai-Hsueh Yang
地址：Belmont CA US,Palo Alto CA US
国籍：US,US
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