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专利名称：MEMS AND/OR NEMS PRESSURE SENSOR
WITH IMPROVED PERFORMANCES ANDDYNAMIC MICROPHONE WITH SUCH ASENSOR
发明人：JOET, Loïc申请号：EP16160880.7申请日：20160317公开号：EP3070963A1公开日：20160921
专利附图：
摘要：dynamic pressure type mems sensor and \\/ or egg rolls with a base (2), and a
sensing element (4) embedded in a rigid support (2) with at least one anchoring zone, thesensitive element (4) comprising a first and a second side face intended to be subjectedto pressure this different.the sensitive element (4) being able to have out of planedisplacement relative to the support (2) in a direction (z) of the detection under theeffect of pressure difference, the pressure sensor also includes means to detect a forceapplied to the sensing element (4) by the pressure difference.
申请人：Commissariat à l'Énergie Atomique et aux Énergies Alternatives
地址：25, rue Leblanc Bâtiment \"le Ponant D\" 75015 Paris FR
国籍：FR
代理机构：Brevalex
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