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SPECTROSCOPE

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专利名称:SPECTROSCOPE发明人:ATSUSHI KATSUNUMA申请号:AU20023496申请日:20021203

公开号:AU20023496A1公开日:20030724

摘要:A spectroscope comprising an incident member for capturing light to bemeasured, a polarization separator that separates the light to be measured from theincident member into two components having polarizing directions orthogonal to eachother so that the separating direction and the polarizing directions of the two

components form an angle of 45 degrees, and outputs the separated two components intwo modes surface-symmetric with respect to a virtual plane orthogonal to theseparating direction, a dispersion optical system that includes a diffraction grating inwhich a plurality of oblong grooves are one-dimensionally arranged in the separatingdirection and along a direction parallel to the virtual plane, respectively diffracts the twocomponents while retaining the surface symmetry of the two components, output fromthe polarization separator, with respect to the virtual plane, and respectively condensesthe diffracted two components to form two spectral images in a separated state, and alight receiving element that receives the above two spectral images and outputs a signalaccording to the intensity sum of the two spectral images.

申请人:NIKON CORPORATION

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