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Method of fabricating thin film transistor of thin

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专利名称:Method of fabricating thin film transistor of

thin film transistor liquid crystal display andmethod of fabricating liquid crystal display

发明人:Hao-Chieh Lee,Chi-Hsun Hsu申请号:US11357812申请日:20060216公开号:US07528019B2公开日:20090505

专利附图:

摘要:A method of fabricating a thin film transistor of a thin film transistor liquidcrystal display is provided. First, a patterned dielectric layer is formed over a substrate. Ametallic layer is formed over the substrate to cover the patterned dielectric layer.Thereafter, the metallic layer is planarized until the patterned dielectric layer is exposed.The remained metallic layer serves as a gate. An insulating layer is formed over thepatterned dielectric layer and the gate, and then a semiconductor layer is formed overthe gate insulating layer above the gate. A source and a drain are formed over the

semiconductor layer.

申请人:Hao-Chieh Lee,Chi-Hsun Hsu

地址:Taoyuan TW,Taoyuan TW

国籍:TW,TW

代理机构:J.C. Patents

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