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专利名称:SAMPLE PROBABILITY OF FAULT FUNCTION
DETERMINATION USING CRITICAL DEFECTSIZE MAP
发明人:Robert J. Allen,Mervyn Y. Tan申请号:US10906549申请日:20050224
公开号:US20060190223A1公开日:20060824
专利附图:
摘要:Methods, systems and program products for determining a probability of fault(POF) function using critical defect size maps. Methods for an exact or a sample POF
function are provided. Critical area determinations can also be supplied based on theexact or sample POF functions. The invention provides a less computationally complexand storage-intensive methodology.
申请人:Robert J. Allen,Mervyn Y. Tan
地址:Jericho VT 05465 US,South Burlington VT 05403 US
国籍:US,US
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