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专利名称：Apparatus for retaining wafers
发明人：Mears, Eric L.,Hertel, Richard J.,Brick, Robert
V.,HOLT, Carl James Jr.
申请号：EP88303977.8申请日：19880503公开号：EP0290218A2公开日：19881109
专利附图：
摘要：A device for releaseably holding a workpiece includes a resilient collet which ispivotally attached to a base. Several fingers for holding the workpiece extend from thecollet. The fingers are pivoted by actuating a member which elastically deforms the
collet and causes the fingers to pivot from a position for engaging the workpiece to aposition for releasing the workpiece and vice-versa. In one application, the base is aplaten for supporting a wafer in a semiconductor processing system and a plurality ofsuch platens and a corresponding plurality of the holding devices are arranged aroundthe periphery of the disk. A counterweight ring is attached to the ring-shaped collet tocounter-balance the moment generated by the centrifugal force of the wafer pressingagainst the fingers as the disk is rotated.
申请人：VARIAN ASSOCIATES, INC.
地址：611 Hansen Way Palo Alto, CA 94303 US
国籍：US
代理机构：Cline, Roger Ledlie
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