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专利名称：Spectrum based endpointing for chemical
mechanical polishing
发明人：Dominic J. Benvegnu,Jeffrey Drue
David,Bogdan Swedek
申请号：US11747786申请日：20070511公开号：US07614936B2公开日：20091110
专利附图：
摘要：Methods and apparatus for providing a flushing system for flushing a topsurface of an optical head. The flushing system includes a source of gas configured to
provide a flow of gas, a delivery nozzle, a delivery line that connects the source of gas tothe delivery nozzle, a vacuum source configured to provide a vacuum, a vacuum nozzle,and a vacuum line that connects the vacuum source to the vacuum nozzle. The source ofgas and the delivery nozzle are configured to direct a flow of gas across the top surfaceof the optical head. The vacuum nozzle and vacuum sources are configured so that theflow if gas is laminar.
申请人：Dominic J. Benvegnu,Jeffrey Drue David,Bogdan Swedek
地址：La Honda CA US,San Jose CA US,Cupertino CA US
国籍：US,US,US
代理机构：Fish & Richardson P.C.
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