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专利名称：Method and apparatus for mixing fluids发明人：John L. Fulton申请号：US11149712申请日：20050610
公开号：US20060280027A1公开日：20061214
摘要：The present invention generally relates to a method and apparatus for mixingof fluids. More particularly, the present invention relates to a method and apparatus formixing fluids introduced into near-critical and supercritical fluids forming a fluid stream. Inthe fluid stream a density gradient is generated that induces a convective velocityresulting in rapid mixing. The invention has application in such commercial applications assemiconductor and wafer fabrication where rapid cycle times or rapid mixing of fluids arerequired and where low tolerances for residues are permitted.
申请人：John L. Fulton
地址：Richland WA US
国籍：US
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