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专利名称：MICRO-ELECTRICAL DISCHARGED BASED
METROLOGY SYSTEM
发明人：MRAZ, Jerry,MONTGOMERY, Jonathan申请号：EP12779279.4申请日：20120502公开号：EP2704868A2公开日：20140312
摘要：A micro-electrical discharge machine based metrology system including acontrol unit with a sensing circuit and a micro-electrical discharge machine with a sensingprobe. The micro-electrical discharge machine based metrology system capable ofsensing dimensions of a work piece at pico-joule energy levels. The micro-electricaldischarge machine based metrology system is a non-contact, non-destructive, and on-board metrology system capable of in-process quality assurance/quality control.
申请人：Smaltec International, LLC
地址：1998 Ohio Street Suite 200 Lisle, IL 60532 US
国籍：US
代理机构：Rupprecht, Kay
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