专利内容由知识产权出版社提供
专利名称:Efficient application management in a cloud
with failures
发明人:Theophilus Benson,Yaoping Ruan,Sambit
Sahu,Anees A. Shaikh
申请号:US13437467申请日:20120402公开号:US082945B2公开日:20141118
专利附图:
摘要:A semiconductor device includes a first layer, first and second active areasdisposed on the first layer; a trench disposed between the first and second active areas,
an insulating oxide that fills the trench to a level below a surface of the first and secondactive layers, and a nitride cap disposed on top of the insulating oxide so that the firstand second active areas can be cleaned without damaging the insulating oxide. A topsurface of the nitride cap in regions adjacent to the first and second active areas inaligned with a top surface of the first and second active areas, a top surface of the nitridecap in a center region of the nitride cap is stepped below the top surface of the adjacentregions, and a void is formed between the top surface regions adjacent to the first andsecond active areas.
申请人:Theophilus Benson,Yaoping Ruan,Sambit Sahu,Anees A. Shaikh
地址:Madison WI US,Yorktown Heights NY US,Yorktown Heights NY US,YorktownHeights NY US
国籍:US,US,US,US
代理机构:F. Chau & Associates, LLC
代理人:Louis J. Percello, Esq.
更多信息请下载全文后查看