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Efficient application management in a cloud with f

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专利内容由知识产权出版社提供

专利名称:Efficient application management in a cloud

with failures

发明人:Theophilus Benson,Yaoping Ruan,Sambit

Sahu,Anees A. Shaikh

申请号:US13437467申请日:20120402公开号:US082945B2公开日:20141118

专利附图:

摘要:A semiconductor device includes a first layer, first and second active areasdisposed on the first layer; a trench disposed between the first and second active areas,

an insulating oxide that fills the trench to a level below a surface of the first and secondactive layers, and a nitride cap disposed on top of the insulating oxide so that the firstand second active areas can be cleaned without damaging the insulating oxide. A topsurface of the nitride cap in regions adjacent to the first and second active areas inaligned with a top surface of the first and second active areas, a top surface of the nitridecap in a center region of the nitride cap is stepped below the top surface of the adjacentregions, and a void is formed between the top surface regions adjacent to the first andsecond active areas.

申请人:Theophilus Benson,Yaoping Ruan,Sambit Sahu,Anees A. Shaikh

地址:Madison WI US,Yorktown Heights NY US,Yorktown Heights NY US,YorktownHeights NY US

国籍:US,US,US,US

代理机构:F. Chau & Associates, LLC

代理人:Louis J. Percello, Esq.

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