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Apparatus for drying cleaned workpieces

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专利内容由知识产权出版社提供

专利名称:Apparatus for drying cleaned workpieces发明人:Shibano, Yoshihide申请号:EP933033.6申请日:19931109公开号:EP0597669A1公开日:19940518

专利附图:

摘要:Plate-like workpieces (W) such as thin ceramic plates which are ultrasonicallycleaned are housed in a tray (1) having an air-permeable bottom plate (13) and a pluralityof air-impermeable sidewall plates (14) extending from peripheral edges of the bottomplate. To dry the cleaned workpieces, the tray is placed in a drying tank (17) and

supported on a support base (21) on the bottom of the drying tank at an inclinedattitude. The drying tank is combined with a hot-air duct (23) which is detachably coupledto respective edges of the sidewall plates of the tray when the tray is supported on thesupport base. The hot-air duct supplies hot air into an interior space of the tray which issurrounded by the sidewall plates. A suction duct (24) is coupled to the bottom plate ofthe tray when supported on the support base and draws hot air supplied from the hot-airduct from within the interior space through the bottom plate.

申请人:Shibano, Yoshihide

地址:1629-1-12 Oyama-cho Machida-shi, Tokyo JP

国籍:JP

代理机构:Leale, Robin George

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