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专利名称：METHOD OF MANUFACTURING A THIN
FILM
发明人：ASPAR, Bernard,LAGAHE,
Chrystelle,RAYSSAC, Olivier,GHYSELEN,Bruno
申请号：EP01940623.0申请日：20010529公开号：EP1285461B1公开日：20170125
摘要：This invention relates to a substrate (1) weakened by the presence of a micro-cavities zone, the micro-cavities zone (4') delimiting a thin layer (5) with one face (2) of thesubstrate (1), some or all of the gaseous species having been eliminated from the micro-cavities (4'). The invention also relates to a process for the production of such asubstrate.
申请人：Commissariat à l'Énergie Atomique et aux Énergies Alternatives,Commissariatà l'énergie atomique et aux énergies alternatives,Commissariat à l'énergie atomique etaux énergies alternatives
地址：FR
国籍：FR
代理机构：Ilgart, Jean-Christophe
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