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专利名称：Dynamically balanced capacitive pick-off
accelerometer
发明人：David L. Malametz申请号：US10863047申请日：20040607公开号：US07146856B2公开日：20061212
专利附图：
摘要：A Micro Electro-Mechanical System (MEMS) acceleration sensing device formedof a silicon substrate having a substantially planar surface; a pendulous sensing elementhaving a substantially planar surface suspended in close proximity to the substrate planar
surface; a flexure suspending the sensing element for motion relative to the substrateplanar surface, the flexure having a both static geometric centerline and a dynamiccenterline that is offset from the static geometric centerline; and a metal electrodepositioned on the substrate surface for forming a capacitor with the pendulous sensingelement, the metal electrode being positioned as a function of the dynamic centerline ofthe flexure.
申请人：David L. Malametz
地址：Lynnwood WA US
国籍：US
代理人：Charles J. Rupnick, Attorney at Law
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