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专利名称：Coating for optical MEMS devices发明人：Seth A. Miller,Simon Joshua Jacobs申请号：US10699410申请日：20031031公开号：US07009745B2公开日：20060307
专利附图：
摘要：A micromechanical device having a deflectable member which contacts astationary member. An antireflective coating is applied to portions of the
micromechanical device to limit undesired reflection from the device. A passivation orlubrication layer is applied to the device to reduce stiction between the deflectable
member and the stationary member. An insulator layer is utilized between theantireflective coating and the lubrication layer to prevent photoelectric-inducedbreakdown of the lubrication layer.
申请人：Seth A. Miller,Simon Joshua Jacobs
地址：Sachse TX US,Lucas TX US
国籍：US,US
代理人：Charles A. Brill,Wade James Brady, III,Frederick J. Telecky, Jr.
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