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专利名称：MEMS-based spectrophotometric system发明人：Dennis S. Greywall申请号：US10667937申请日：20030922公开号：US06872947B1公开日：20050329
专利附图：
摘要：A portable spectrophotometric system for detecting one or more targetsubstances. In a representative embodiment, a system of the invention has an opticalgrating, an array of photo-detectors, and a MEMS device having a movable platepositioned between the grating and the array. Light transmitted through a gaseous
sample is dispersed by the grating and is imaged onto the movable plate, which has aplurality of openings corresponding to selected infrared absorption lines of the targetsubstance. A small-amplitude oscillation is imparted onto the plate such that theopenings periodically move in and out of alignment with the corresponding intensityfeatures in the image, which modulates electrical signals generated by the correspondingphoto-detectors. A lock-in signal processor analyzes the modulation pattern bycomparing it to the pattern expected in the presence of the target substance. When apositive correlation between the patterns is established, the system warns the userabout the presence of the target substance.
申请人：Dennis S. Greywall
地址：Whitehouse Station NJ US
国籍：US
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