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专利名称：DEVICE FOR GENERATING A HOLLOW
CATHODE ARC DISCHARGE PLASMA
发明人：MORGNER, HENRY,MATTAUSCH,
GÖSTA,METZNER,
CHRISTOPH,JUNGHÄHNEL,
MICHAEL,LABITZKE, RAINER,KLOSE,LARS,WERNER, LARS,KUBUSCH, JÖRG
申请号：EP12775662.5申请日：20121017公开号：EP2795657A1公开日：20141029
摘要：An apparatus for generating a hollow cathode arc discharge plasma, includingtwo plasma sources, each including a hollow cathode and an electrode which is associatedwith the hollow cathode and which has an opening that extends through the electrode,wherein the hollow cathodes of the two plasma sources are connected to a pulse
generator which generates a bipolar, medium-frequency pulsed voltage between the twohollow cathodes. Here, in each of the two plasma sources, the hollow cathode isconnected in an electrically conducting manner, directly or with interconnection of atleast one current direction limiting component, to the associated electrode.
申请人：FRAUNHOFER-GESELLSCHAFT ZUR FÖRDERUNG DER ANGEWANDTENFORSCHUNG E.V.
地址：Hansastraße 27c 80686 München DE
国籍：DE
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