专利内容由知识产权出版社提供
专利名称：Electrical Resistance Heater and Heater
Assemblies
发明人：Ronald L. Colvin,Dennis Goodwin, SR.,Jeff
Mittendorf,Charles J. Moretti,John W.Rose,Earl Blake Samuels
申请号：US16160941申请日：20181015
公开号：US20190062910A1公开日：20190228
专利附图：
摘要：A system for processing substrates is described. In one embodiment, the
system comprises a process chamber, at least one electrical resistance heater, and atleast one Coanda effect gas injector.
申请人：GES Associates, L.L.C.
地址：Phoenix AZ US
国籍：US
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