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专利名称：Cathode shielded coating apparatus发明人：Rainer Buhl,Hans Signer申请号：US06/115729申请日：19800128公开号：US04279216A公开日：19810721
摘要：A vacuum evaporator includes a housing defining a vacuum chamber which hasmounting for an evaporative material and an electrode spaced from the evaporativematerial which is arranged adjacent the support for a substrate to be coated. A screeningelement is located between the electrode and the substrate support in the vacuumchamber. The vacuum chamber has a gas inlet port through which gases may be passed.
申请人：BALZERS AKTIENGESELLSCHAFT FUER HOCHVAKUUMTECHNIK UND DUENNESCHICHTEN
代理机构：McGlew and Tuttle
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